Germany – Laboratory, optical and precision equipments (excl. glasses) – Kauf einer DRIE/ RIE-Anlage (Plasmaätzanlage)
Opportunity Score
Confidence: 55%
Complexity: high
25 days
Deadline
supplies
Contract
Deep Portfolio Analysis
- Company fit score
- Missing certificates
- Eligibility blockers
- Bid / No-Bid recommendation
AI Analysis Summary
Open tender by Westsächsische Hochschule Zwickau for a DRIE/RIE plasma etching system (including substrate electrode, edge protection, notching control, endpoint detection, software, installation, and training). Delivery to Zwickau, Germany, within 50 weeks. The tender appears to be for a single lot despite structured data showing three lots (likely a data extraction issue). Award criteria: 30% price, 60% fulfillment of performance parameters, 10% delivery time. Selection criteria require an application lab within 12 hours travel from Zwickau. No estimated value disclosed. Submission deadline 2026-07-10, electronic submission only, German language. Procurement documents not analyzed.
Strengths
Documents available
Open procedure
25 days left
Analysis may be incomplete
Only part of the procurement documentation was analyzed. Additional eligibility requirements, certificates, or submission documents may exist in the remaining tender documentation.
Key Requirements
- System must process 100mm and 150mm wafers (with/without flat, notch)
- Silicon etch rate ≥10 µm/min in acceptance test
- Sidewall deviation ≤10 µm from tangent
Award Criteria
Preiskriterium
Preiskriterium
| Criterion | Type |
|---|---|
Preiskriterium Preiskriterium | Price |
Buyer
Name
Westsächsische Hochschule Zwickau
Location
Zwickau, DEU
Website
Buyer profile
Identifier
14-1215011WHZ01-34
Lots (1)
Supply of a DRIE/RIE system for silicon deep etching and RIE of thin dielectrics, including all components (process chamber, ICP source, gas lines, pumps, etc.), electrostatic chuck, edge protection, notching control, endpoint detection (optical emission), software with SEMI E95 compliance, installation, and training. Acceptance test with specific etch rate and profile requirements. Delivery to Zwickau, max 50 weeks after order.
Procurement Details
Publication
04 Jun 2026
Deadline
10 Jul 2026, 08:00
Procedure
open
Contract
supplies
Duration
50 WEEK
Language
DEU
Publication #
388383-2026
Classification
Performance: Germany
Documents (2)
Opportunity Score
Confidence: 55%
Complexity: high
25 days
Deadline
supplies
Contract
Deep Portfolio Analysis
- Company fit score
- Missing certificates
- Eligibility blockers
- Bid / No-Bid recommendation